Applied ATON
Applied Materials
Product Overview
The Applied ATON series is a sputter deposition system for solar cell manufacturing. With high quality film uniformity and high throughput, the ATON provides high performance with a low cost of ownership. This system can be used for deposition of silane-free silicon nitride ...expand
Type: Crystalline
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The Applied ATON series is a sputter deposition system for solar cell manufacturing. With high quality film uniformity and high throughput, the ATON provides high performance with a low cost of ownership. This system can be used for deposition of silane-free silicon nitride anti-reflective/passivation layers, transparent conducting oxide, precursors, adhesion layers and back surface reflectors on glass or wafer substrates.
